多功能扫描探针显微镜的设计与实现  

The Design of An Multimode Scanning Probe Microscope

作　　者：戴长春[1] 黄桂珍[1] 张新文 施倪承 

机构地区：[1]中国科学院化学研究所,中国地质大学

出　　处：《仪器仪表学报》1996年第S1期269-271,367,共4页Chinese Journal of Scientific Instrument

摘　　要：扫描探针显微镜发展至今已经成为具有探测、微加工、微控制和各种谱学等功能的综合性仪器。我们研制的多功能扫描探针显微镜，是一种与光学显微镜结合的、具有ＳＴＭ、ＡＦＭ、ＬＦＭ等多模式和功能的实用型仪器。Several styles of high resolution scanning probe microscopes, SPM, have been developed in recent years. Our Multimode scanning probe microscope is capable of operating in several common scanning modes, as STM, AFM, LFM, STS, etc. It consists of four major components: The microscope, the controller, the optical microscope with CCD monitor and the computer workstation. The microscopes contain, a piezoelectric scanner which controls the scanning motion, the head which varies for STMs and AFMs. The controller is the analog system to control the microscope and select image data. The optical microscope and CCD use for monitoring the cantilever and sample. And computer workstation supplies the scanning, image displaying and processing. The SPM can scan a wide variety of samples with scan sizes from the atomic level up to 10 microns squares. The SPM is operated easier, for it is installed a monitoring system to observe states of cantilever and sample realtimely.

关 键 词：扫描探针显微镜 纳米科技 

分 类 号：TH742[机械工程—光学工程]