压电微电机压电振子特性分析  

Analysis of Characters for Piezoelectric Vibrator of Micro Piezoelectric Motor

作　　者：马建旭[1] 王立鼎[1] 崔天宏[1] 吕琼莹[1] 

机构地区：[1]中国科学院长春光学精密机械研究所

出　　处：《仪器仪表学报》1996年第S1期280-283,共4页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金;攀登计划资助

摘　　要：本文对行波式压电微电机定子的圆片形压电振子进行了研究，分析其振动特性和该振子中传动波的形成机理。以上研究为全面研究压电微电机提供了必要的理论基础。The micro piezoelectric motor is an important driving device in MEMS.Most of the research work on micro piezoelectric motors has been focused on various aspects after travelling wave have been yielded,but almost no research has reported on a very critical part of the motor-piezoelectric vibrator. In this paper, piezoelectric disc vibrator of travelling wave micro piezoelectric motor is studied when considering piezoelectric effect. The vibration character is analysed and the yielding principle of transducing wave is calculated.This research will provide a basic theory for designing micro motors,for studying the transmission principle and for improving the output energy efficiency.

关 键 词：特性分析 压电 电振子 微电机 形成机理 振动特性 传动波 行波式 机压 电场强度 

分 类 号：TM38[电气工程—电机]