碱土金属掺杂SnO_2薄膜气体传感器  

THE ALKALINE EARTH METAL DOPED SnO2 THIN FILM GAS SENSOR

作　　者：傅敏恭[1] 王晓俊[1] 陈戬[1] 王海源[1] 

机构地区：[1]南昌大学化学系

出　　处：《郑州轻工业学院学报（自然科学版）》1994年第S1期160-166,共7页Journal of Zhengzhou University of Light Industry:Natural Science

基　　金：江西省自然科学基金

摘　　要：经过真空镀锡膜、氧化和化学浸渍，制作了碱土金属掺杂ＳｎＯ２薄膜气敏元件，并测试了元件的气敏特性．结果表明，元件对乙醇和丙酮气体灵敏度和选择性得到提高、而对苯、丁烷、液化石油气、氨气、氢气和煤气不敏感．The alkaline earth metal doped SnO2 thin film gas sensors was manufactured by e-vaporating Sn in vacuum oxiding SnO2 film and immerging method. The gas sensingproperty of thin film material was studled.The doped gas sensors improve the sensitivi-ty and selectivity to CH3CH2OH,CH3COCH3.

关 键 词：碱土金属 氧化锡 薄膜 气体传感器 

分 类 号：O611[理学—无机化学]