ELECTRON BEAM OPTICS CALCULATIONS FOR ROTATIONALLY SYMMETRIC SYSTEMS POSSESSING THIRD ORDER ABERRATIONS  

作　　者：西门记业 刘志雄 

机构地区：[1]Department of Radio-Electronics Peking University [2]Beijing

出　　处：《Journal of Electronics(China)》1993年第4期331-343,共13页电子科学学刊（英文版）

摘　　要：Based on theory of electron beam optics,the beam optical calculations for animmersion lens and a unipotential lens have been performed.The computational results showthat the beam optical calculations are consistent to the ray tracing and that the beam emittanceis conserved,even if the third order aberrations exist.Based on theory of electron beam optics,the beam optical calculations for an immersion lens and a unipotential lens have been performed.The computational results show that the beam optical calculations are consistent to the ray tracing and that the beam emittance is conserved,even if the third order aberrations exist.

关 键 词：CONSERVED optics TRACING BEAM Runge immersion Kutta ABERRATION verify faster 

分 类 号：TN01[电子电信—物理电子学]