X光预电离KrF准分子激光参量的研究  

Parametric research on X-ray preionized KrF excimer lasers

作　　者：楼祺洪[1] 董景星[1] 魏运荣[1] 丁泽安 霍芸生 

机构地区：[1]中国科学院上海光机所,201800

出　　处：《中国激光》1990年第S1期12-15,共4页Chinese Journal of Lasers

摘　　要：在紫外预电离准分子激光器中,KrF激光的脉冲能量一般大于XeCl激光脉冲能量。在X光预电离条件下,呈现相反的趋势。本文通过激光参量研究及动力学过程分析,解释了上述现象。In the UV preionized excimer laser, the output energy of KrF laser is generally greater than that of the XeCl laser. Whereas the output energy of KrF laser is smaller than that of the XeCl laser with x-ray preionization. This results are explained by parametric research and kinetic analysis of the laser.

关 键 词：KRF准分子激光 X光预电离 

分 类 号：TN24[电子电信—物理电子学]