超声搅拌化学浴沉积法制备大颗粒和致密的CdS薄膜(英文)  

Preparation of Large Grain and Dense CdS Thin Films Using Ultrasonic Agitation Chemical Bath Deposition

作　　者：史成武[1,2] 陈柱[1,2] 史高杨[1,2] 孙人杰[1] 

机构地区：[1]合肥工业大学化学工程学院,合肥230009 [2]中国科学院新型薄膜太阳电池重点实验室,合肥230031

出　　处：《物理化学学报》2011年第12期2821-2825,共5页Acta Physico-Chimica Sinica

基　　金：supported by the National Natural Science Foundation of China(51072043);National Key Basic Research Program of China(973)(2011CBA00700);Anhui Province Science and Technology Plan Project of China(2010AKND0794);College Natural Science Foundation of AnhuiProvince,China(KJ2010A266);Undergraduate Innovation Fund of Hefei University of Technology,China(cxsy102084)~~

摘　　要：采用超声搅拌化学浴法(UCBD)在SnO2:F透明导电玻璃衬底上制备了CdS薄膜.研究了退火和CdCl2处理对UCBD-CdS薄膜的表面形貌、晶体结构和直接带隙的影响,比较了沉积时间对UCBD-CdS薄膜中CdS聚集体颗粒大小和堆积致密性的影响.结果表明,CdCl2处理可使CdS聚集体中的小颗粒重新熔合在一起,但CdS聚集体的大小并没有改变.在UCBD-CdS薄膜的沉积过程中,CdS薄膜的横向和纵向生长速率之比会随着沉积时间的不同而改变,且沉积时间是获得大颗粒的CdS聚集体和致密的UCBD-CdS薄膜的重要影响因素.当沉积时间为40min时,获得的UCBD-CdS薄膜较致密,CdS聚集体的大小为180nm,膜厚为80.8nm,适合作为薄膜太阳电池的窗口层.We deposited CdS thin films onto F-doped SnO2 transparent conductive glass by ultrasonicagitation chemical bath deposition （UCBD）. The influence of the annealing and CdCl2-treatment on thesurface morphology, crystal structure, and direct band gap of the UCBD-CdS thin films was investigated.The effect of deposition time on the grain size of the CdS aggregates and the stack denseness of theUCBD-CdS thin films was compared. The results reveal that the small grains in the CdS aggregates weremelted together and the CdS aggregate size did not change in the UCBD-CdS thin films after theCdCl2-treatment procedure. It is interesting that the ratio of the horizontal to vertical deposition rate variedwith deposition time over the deposition period of the UCBD-CdS thin films. The deposition time was veryimportant to obtain large CdS aggregate grains and dense UCBD-CdS thin films. Over a deposition time of40 min the resulting UCBD-CdS thin films were dense and had a 180 nm grain size of CdS aggregates anda 80.8 nm of thin film thickness. The large-grained and dense UCBD-CdS thin films were suitable for thinfilm solar cells as a window layer.

关 键 词：CDS薄膜 超声搅拌 化学浴沉积 沉积时间 退火 CdCl2处理 

分 类 号：O614.242[理学—无机化学]