球面微通道板在极紫外波段的量子探测效率  

Quantum detection efficiency of spherical microchannel plate in extreme ultraviolet

作　　者：尼启良[1] 韩素立[2] 陈斌[1] 王海峰[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《光学精密工程》2011年第11期2596-2602,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.61077016)

摘　　要：由于球面微通道板(MCP)的量子探测效率与极紫外(EUV)相机的灵敏度有关,本文研究了球面MCP量子探测效率的特点和测量方法。根据微通道板在EUV波段光电子产额的理论模型,计算了球面MCP在该波段下随不同入射角变化的电子产额。使用激光等离子体光源测量球面MCP在EUV波段的量子探测效率,搭建了球面MCP在该波段的量子探测效率的测量装置,测量了球面MCP在不同位置的量子探测效率随波长和入射角的变化曲线。实验结果表明,入射角为15°时的量子探测效率约为入射角为0°时的5倍。As the Quantum Detection Efficiency（QDE） of a spherical micro-channel plate in a photo-counting imaging detector is relative to the sensitivity of an Extreme Ultravialet（EUV）camera,this paper researches its characteristics and measurement.The secondary electron yield of the spherical MCP in EUV region is calculated based on the theoretical model describing secondary electron yield of the MCP,Then the QDE of the spherical MCP is measured by using a laser-produced plasma source,and an instrument for measuring the QDE of spherical MCP is built.The QDE of spherical MCP for different positions on a MCP surface is measured at different incident angles and wavelengths.The experimental results show that the QDE at an incident angle of 15° is five times of that at incident angle of 0°.

关 键 词：极紫外(EUV)相机 球面微通道板 次级电子产额 量子探测效率 

分 类 号：TN144[电子电信—物理电子学]