Layer-by-layer assembly carbon nanotubes thin film based gas sensors for ammonia detection  

作　　者：SUN Ping JIANG YaDong XIE GuangZhong DU XiaoSong LI Xian HU Jia 

机构地区：[1]School of Optoclcctronic Information, State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China （UESTC）, Chengdu, 610054, China [2]Life and Physical Science College, Sichuan Agricultural University, Ya＇an 625014, China

出　　处：《Science China(Information Sciences)》2011年第12期2680-2686,共7页中国科学（信息科学）（英文版）

基　　金：supported by the National Natural Science Foundation of China(Grants Nos.60736005,60876051,60425101-1);SRF for ROCS,SEM(Grant No.GGRYJJ08-05);the National High-Tech Research & Development Program(Grant No.2007AA03Z422)

摘　　要：Single walled carbon nanotubes （SWNTs） were deposited on interdigital electrode （IDE） devices and quartz crystal microbalance （QCM） devices through layer-by-layer self-assembly method to fabricate resistance sensitive and mass sensitive gas sensors, respectively. Their ammonia gas-sensitive characteristics were detected at different temperature. It is revealed that the SWNTs based mass sensitive gas sensor has good sensing properties at room temperature. However, the SWNTs based resistance sensitive gas sensor has irreversible response for ammonia gas. When the temperature increases, the noise of SWNTs based mass sensitive gas sensor increases and the gas sensitive characteristic decreases. Meanwhile, the humidity effect is also discussed. It is important to optimize gas sensor by making it work at an appropriate external environment.Single walled carbon nanotubes （SWNTs） were deposited on interdigital electrode （IDE） devices and quartz crystal microbalance （QCM） devices through layer-by-layer self-assembly method to fabricate resistance sensitive and mass sensitive gas sensors, respectively. Their ammonia gas-sensitive characteristics were detected at different temperature. It is revealed that the SWNTs based mass sensitive gas sensor has good sensing properties at room temperature. However, the SWNTs based resistance sensitive gas sensor has irreversible response for ammonia gas. When the temperature increases, the noise of SWNTs based mass sensitive gas sensor increases and the gas sensitive characteristic decreases. Meanwhile, the humidity effect is also discussed. It is important to optimize gas sensor by making it work at an appropriate external environment.

关 键 词：layer-by-layer self-assembly carbon nanotube gas sensor 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB383[自动化与计算机技术—控制科学与工程]