场发射冷阴极电离规的研究进展  

Latest Development of Ionization Gauges with Field Emitters

作　　者：蔡敏 李得天 成永军 常鹏[2] 

机构地区：[1]兰州物理研究所真空低温技术与物理重点实验室,兰州730000 [2]兰州大学物理科学与技术学院,兰州730000

出　　处：《真空科学与技术学报》2011年第6期732-738,共7页Chinese Journal of Vacuum Science and Technology

摘　　要：碳纳米管冷阴极具有优异的场致电子发射特性,在电子源应用方面具有很好的前景,被认为是很有希望取代热阴极的材料之一。本文回顾了20多年来场发射冷阴极电离规的发展。内容包括微尖型场发射阴极电离规和碳纳米管场发射阴极电离规的发展,从中可以看出场发射电离规的现状和发展趋势。最后对碳纳米管超高/极高真空电离规的发展进行了展望。We addressed the jumping progress in the development of ionization gauge with field emitters,particularly the emerging carbon nano-tube（CNT） field-emitters,in the past two decades.The discussions focused on three major topics：to begin with,the design considerations of the ionization gauges with Spindt cathodes;second,the fabrication technologies of field emitters with carbon nanotube array;and finally,the technical feasibility and engineering challenges of constructing the ionization gauge with CNT emitters for pressure measurement in the ultra high vacuum and extremely high vacuum.The development trends of the ionization gauge were also tentatively discussed in a thought-provoking way.

关 键 词：电离规 微尖阵列 碳纳米管 超高/极高真空 

分 类 号：TB77[一般工业技术—真空技术]