碳管炉真空系统的检漏  

Leak detection for the vacuum system of carbon tube furnace

作　　者：贾佳林[1] 熊晓梅[1] 纪平[1] 李高山[1] 闫果[1] 李成山[1] 

机构地区：[1]西北有色金属研究院超导材料研究所,陕西西安710016

出　　处：《真空》2011年第6期69-71,共3页Vacuum

摘　　要：本文主要论述了碳管炉真空系统的组成及特点,利用静态压升检漏法和氦质谱检漏两种手段评定碳管炉密封性的好坏,此方法对真空热处理设备及类似装备的设计、检漏具有很好的指导意义。In this paper, the constitution and Characteristics of the vacuum system of carbon tube furnace was introduced. Two independent methods, static pressure measurement and helium mass spectrometer leak detection, were combined to evaluate the pressure rise rate and leak rate of the carbon tube furnace, respectively. The results show that the combination of these two methods is of great importance for the leak detection and design of all the similar vacuum heat treatment equipments.

关 键 词：压升率 真空 检漏 氦质谱检漏 

分 类 号：TB774[一般工业技术—真空技术]