TiAlON系薄膜材料的椭偏研究  

Ellipsometric study of TiAlON-based film

作　　者：刘文德[1] 陈赤[1] 杜淼[2] 郝雷[2] 徐英莹[1] 樊其明[1] 张静[1] 

机构地区：[1]中国计量科学研究院,北京100013 [2]北京有色金属研究总院能源材料与技术研究所,北京100088

出　　处：《应用光学》2011年第6期1202-1205,共4页Journal of Applied Optics

基　　金：国家自然科学基金资助项目(10774143);中国计量科学研究院基本科研业务费(23-AKY1012)

摘　　要：对新型太阳能用薄膜材料TiAlON材料进行了椭偏研究。采用Cauchy,Lorentz和Tauc Lorentz模型对绝缘性TiAlON薄膜的椭偏测量结果进行了模拟,得到了薄膜的光学常数。通过比较色散模型及薄膜结构在不同波段的应用情况,说明Tauc Lorentz模型更适合于从紫外到近红外宽光谱的拟合。结果表明光谱椭偏术可以作为表征TiAlON材料系的可靠手段,是进一步表征多层膜系光学性质的基础。TiAlON-based materials applied in solar energy were studied by spectroscopic ellipsometry.Different dispersion formulae such as Cauchy,Lorentz and Tauc-Lorentz models were applied to fit the experimental data of insulation TiAlON film and its optical constants were obtained.The application of the different dispersion models and film structures were compared in various spectral ranges.It is demonstrated that the Tauc-Lorentz model is more suitable for fitting ultraviolet to near-infrared spectroscopy.The results suggest that spectroscopic ellipsometry is a reliable method for characterizing the TiAlON-based material system,and can be used for further study on the optical properties of multi-layer film stacks.

关 键 词：TiAlON薄膜 光谱椭偏术 Lorentz模型 Cauchy模型 Tauc-Lorentz模型 

分 类 号：O439[机械工程—光学工程] TB3[理学—光学]