脉冲Nd:YAG激光烧蚀金属Cu的诱导发光机理  

Detailed Mechanism studies of Plume Emission Produced by Pulsed Nd:YAG Laser Ablation of Metal Cu

作　　者：黄庆举[1] 曾宪康[1] 方尔梯[1] 

机构地区：[1]华东理工大学化学物理研究室,上海200237

出　　处：《华东理工大学学报（自然科学版）》1999年第6期614-617,621,共5页Journal of East China University of Science and Technology

基　　金：国家自然科学基金

摘　　要：通过测定Ｎｄ：ＹＡＧ脉冲激光烧蚀金属Ｃｕ 靶诱导等离子体发光羽的发射光谱及其强度随时间与空间的分布，对发光粒子的激发机理进行了研究，结果表明，激光烧蚀诱导等离子体发光羽中，电子碰撞传能是原子和离子激发的主要途径。Time and spatial resolved measurements of plume emission spectra produced by pulsed Nd:YAG laser ablation of metal Cu in He atmosphere are reported.The detailed mechanism of species excitation is discussed.The results are qualitatively explained using a simple model based on excitation of atom and ion in plume arising from inelastic collision between the elemental species and electron with high kinetic energy.

关 键 词：YAG激光 激光烧蚀溅射 铜 等离子体 发光羽 

分 类 号：O536[理学—等离子体物理] TN249[理学—物理]