一种基于LabVIEW的相位法PSD微位移测量系统设计  

Design on a phase method PSD micro-displacement measurement system based on LabVIEW

作　　者：吴腾蛟[1] 薛联[1] 段莹[1] 席锋[1] 秦岚[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400044

出　　处：《传感器与微系统》2011年第12期116-118,共3页Transducer and Microsystem Technologies

基　　金：重庆市自然科学基金资助项目(CSTC;2009BB3363)

摘　　要：基于相位法的位置敏感探测器(PSD)检测技术较之幅值法具有处理电路简单、检测精度高、抗干扰能力强、环境适应性好等优点。利用二维双面分流型PSD和LabVIEW虚拟仪器平台,实现了基于相位法的PSD微位移测量系统的设计。实验表明:PSD输出信号的相位差和光斑位置具有良好的线性关系,非线性误差小于0.1%。PSD detection technique based on phase method has advantages of simple processing circuit, high detecting precision, strong anti-interference ability and good environmental adaptability, compared with amplitude method. A micro-displacement measurement system based on LabVIEW and 2D duo-lateral PSD is designed. Experimental results reveal that the phase difference of the PSD output signal and the light spot position have good linear relation, and the nonlinear error is less than 0.1%.

关 键 词：位置敏感探测器 相位法 LABVIEW 虚拟仪器 微位移测量 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]