Bimorph变形镜10.6μm薄膜研究  

10.6 μm Reflecting Coatings on Bimorph Mirror

作　　者：张耀平[1,2] 周宏[1,2,3] 樊峻棋[1,2] 许鸿[1,2] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院自适应光学重点实验室,成都610209 [3]中国科学院研究生院,北京100049

出　　处：《光电工程》2011年第12期94-98,共5页Opto-Electronic Engineering

摘　　要：基于压电驱动器的Bimorph变形镜是10.6μm系统的一个重要元件。为了镀制薄膜,本文首先利用有限元软件对两种镀膜夹持方式与沉积温度进行了计算,对热应力产生的热变形进行了分析,选择了合适的镀膜夹持方式。为了预测bimorph变形镜受激光辐照后的温升,对单晶硅与石英玻璃制作的bimorph变形镜有限元模型进行了计算与分析。最后,利用光度计对镀制的薄膜进行了反射率测量。试验结果显示反射率测量值大于99.5%,满足实际系统的需要。Bimorph mirrors based on the use of piezoelectric actuators are important part in some laser systems,such as 10.6 μm laser system.In order to deposit the bimorph mirror,the clamping ways and deposition temperature are first factors to be considered for two models with different clamping ways of bimorph mirror developed using FEA software.The distribution of deformation and stress of bimorph mirror due to thermal residual stress are calculated.Based on the results,we select the better clamping way to deposit the bimorph mirror.In order to predict the temperature rising of mirror surface induced by the 10.6 μm laser irradiation,the FEA models of bimorph mirrors with different mirror surface materials,which include the mono-crystalline silicon and quartz glass,are developed and calculated.Finally,the coated bimorph mirror is measured by spectrometer,and the average reflectance of enhanced coating is greater than 99.5% in 10.6 um.The coated bimorph deformable mirror is now applied in the 10.6um laser system and can satisfy the practical need.

关 键 词：Bimorph变形镜 Ag膜 有限元 夹持方式 

分 类 号：O484.1[理学—固体物理]