Development of Numerical Model for Radio Frequency Atmospheric Pressure Glow Discharges in Argon  

作　　者：付平 钱宇俊 宋书通 丁可 石建军 

机构地区：[1]College of Science,Donghua University [2]Member of Magnetic Confinement Fusion Research Center,Ministry of Education,Donghua University [3]State Key Laboratory for Modification of Chemical Fibers and Polymer Materials,College of Material Science and Engineering,Donghua University

出　　处：《Journal of Donghua University(English Edition)》2011年第4期391-395,共5页东华大学学报（英文版）

基　　金：National Natural Science Foundations of China (No. 10835004,No. 10905010);Shanghai Shuguang Program,China (No.08SG31)

摘　　要：A one-dimensional,self-consistent fluid model is developed for a computational investigation on discharge characteristics and dynamics of radio frequency(RF) glow discharges in atmospheric argon,which are demonstrated through the spatial and temporal profiles of plasma species,electric field,and mean electron energy.Furthermore,in the discharge current density range from 7.1 mA/cm2 to 119.5 mA/cm2,different discharge operation modes of α and γ are indicated by changing differential conductivity of voltage-current characteristics and sheath dynamics in terms of sheath voltage and sheath thickness.A one-dimensional, self-consistent fluid model is developed for a computational investigation on discharge characteristics and dynamics of radio frequency （RF） glow discharges in atmospheric argon, which are demonstrated through the spatial and temporal profiles of plasma species, electric field, and mean electron energy. Furthermore, in the discharge current density range from 7.1 mA/ cm2 to 119.5 mA/cm2 , different discharge operation modes of α and γ are indicated by changing differential conductivity of voltagecurrent characteristics and sheath dynamics in terms of sheath voltage and sheath thickness.

关 键 词：atmospheric pressure glow discharge （ APGD ） numerical simulation mode transition sheath dynamics 

分 类 号：TN92[电子电信—通信与信息系统] O461.21[电子电信—信息与通信工程]