基于磁控溅射法的超声换能器压电晶片镀膜方法应用  

Application for Ultrasonic Transducer Piezoelectric Chip Coating Processing of Magnetron Sputtering

作　　者：杨德俊[1] 吴杰歆[1] 

机构地区：[1]广东省计量科学研究院,广东广州510405

出　　处：《电子质量》2011年第12期71-73,共3页Electronics Quality

摘　　要：随着科学技术的不断发展,超声波被广泛应用于医学、军事、工业和农业等方面。尤其是在医疗领域,超声的应用为医疗事业的发展发挥了很大的作用。但是,过大输出的超声功率会对人体造成一定的伤害。超声换能器在超声功率溯源中扮演重要的角色。而压电晶片是超声换能器中重要的组成部分,长期实验表明,基于磁控溅射技术对超声换能器的压电晶片进行的镀膜加工效果理想。该文对超声换能器的压电晶片镀膜加工过程进行探讨描述。With the continuous development of science and technology,ultrasound is widely used in medical,military,industry and agriculture.Especially in the medical field,the application of ultrasound for medical industry has played a significant role in the development.However,the output of the ultrasound power is too large will cause some harm to the human body.Ultrasonic transducer in the ultrasonic power measurements plays an important role.The piezoelectric ultrasonic transducer is an important component of long-term experiments show that the magnetron sputtering technique based on the ultrasonic piezoelectric transducer for the coating process results are satisfactory.In this paper,ultrasonic piezoelectric transducer to explore coating process described.

关 键 词：超声换能器 压电效应 镀膜 

分 类 号：TB552[理学—物理]