超薄放射源和沉积膜厚度的测量比对  

INTERCOMPARISON OF MEASUREMENTS FOR THE THICKNESS OF ULTRA THIN SOURCES AND DEPOSITED FOILS

作　　者：杜鸿善[1] 梁东麒 王豫生[1] 郭春生[1] 李俊兰[1] 

机构地区：[1]中国原子能科学研究院

出　　处：《原子能科学技术》1990年第4期37-41,共5页Atomic Energy Science and Technology

基　　金：中国自然科学基金

摘　　要：在SF-3型石英微量天平监测下制备的超薄放射源和沉积膜,分别采用称重法、电子谱线分析法和背散射法对其厚度进行了比对测量,测量结果一致性较好,并与SF-3型石英微量天平给出的值相符。从而在实验上证明了SF-3型石英微量天平是可靠的。Intercomparison of measurements for the thickness of ultra thin sources anddeposited foils prepared by vacuum evaporation method has been made by meansof the gravimetric, the electron spectrometric analysis and the backscatteringmethods respectively. The results agree with the values obtained with the quartz-crystal micro-balance of Model SF-3. It is proved then that quartz-crystalmicro-balance of Model SF-3 is a reliable tool for the thickness measurements ofultra thin sources and deposited foils prepared with the vacuum evaporationtechnique.

关 键 词：超薄型 放射源 沉积膜 测量 比对 

分 类 号：O571.1[理学—粒子物理与原子核物理]