用于红外探测器组件检测的超高灵敏度检漏仪  

New type of super high-sensitivity leak detector used for IRFPA

作　　者：左雷[1] 

机构地区：[1]中国电子科技集团公司第二十七所,河南郑州450005

出　　处：《激光与红外》2011年第12期1327-1330,共4页Laser & Infrared

摘　　要：提出了一种采用累积法进行超高灵敏度氦质谱检漏的先进技术,基于该技术及相关材料特殊处理工艺设计并研制出了新型超高灵敏度检漏仪器,检测灵敏度优于8×10-15 atm.cc/s.He,是常规氦质谱检漏仪器灵敏度的1000倍以上,已成功应用于红外焦平面探测器组件等长寿命真空电子元器件产品的研制和生产工艺检测中,也是高能粒子加速器、核物理学、航天产品等重要的超高密封产品重要的漏率检测仪器。This paper puts forward an advanced technology of super high-sensitivity helium mass spectrum leak detec- tion by cumulative method. Based on this technology and special processing technics of related materials, the author designed and produced a new type of super high-sensitivity leak detector with detecting sensitivity surpasses 8×10^-15 arm. cc/s. He,which is more than 1000 times as that of usual helium mass spectrum leak detectors. This new type of super high-sensitivity detector has been successfully applied in the R＆D and producing technics checking of long-life vacuum electrical components like infrared FPA detector. It is also an essential leak rate detection device for super highly-sealed products e.g. energetic partieleaceelerator, nuclear physics, aerospace products etc.

关 键 词：超高灵敏度 漏率 检漏仪 电抛光 真空除气 

分 类 号：TN21[电子电信—物理电子学]