基于半导体微环谐振器的光滤波器设计方法  

Design Method of Optical Filter Based on Semiconductor Micro-Ring Resonator

作　　者：张彬[1] 张淑梅[1] 

机构地区：[1]中国科学院长春光学精密仪器与物理研究所,长春130033

出　　处：《半导体技术》2012年第1期24-28,共5页Semiconductor Technology

摘　　要：提出了一种完整的基于微环谐振器的光学滤波器的系统设计方法。使用该方法可以从一定滤波特性参数出发,计算得到每个环之间的耦合系数,再根据耦合系数和器件尺寸的关系得到具体的器件尺寸,从而实现光学滤波器从性能特性到器件尺寸设计的一整套完整的解决方案。并在此基础上利用感应耦合等离子体(ICP)干法刻蚀技术和聚酰亚胺介质平坦化工艺制作了双环光滤波器,对该设计方法进行了初步的实验验证,使用扫描电子显微镜和原子力显微镜等多种测试方法证实,制作的光波导具有很好的性能,测试了其梳状滤波特性。A system design method of optical filter based on micro-ring resonator was provided. Using this method, coupling parameter and passing parameter of series, micro-ring resonator were calculated. The size of device was received according to the relationship between the coupling parameter and the size of devices. A full solution of optical filter design flow from filter characteristics to device geometry was provided. In order to verify the design strategy preliminarily, a double micro-ring optical filter was design and fabricated. The process is involved advanced inductive coupled plasma （ICP） etch technology and Polyimide smoothness technology. The measurement of electron microscope and atomic force microscope show that the light guide has good performances. And the comb filter characteristic was tested.

关 键 词：微环谐振器 光滤波器 SPICE模型 耦合系数 感应离子刻蚀 

分 类 号：TN252[电子电信—物理电子学] TN256