高功率激光反射镜热畸变补偿结构设计与仿真  

Simulation and structure design of a high power laser mirror with self-compensation of thermal distortion

作　　者：彭玉峰[1] 吴定允[2] 张毅[1] 程祖海[3] 

机构地区：[1]河南师范大学物理与信息工程学院,新乡453007 [2]周口师范学院物理与电子工程系,周口466001 [3]华中科技大学武汉光电国家实验室,武汉430074

出　　处：《激光技术》2012年第1期120-123,共4页Laser Technology

基　　金：国家自然科学基金资助项目(61077037);河南省基础与前沿技术计划资助项目(102300413214)

摘　　要：为了研究激光反射镜热畸变补偿结构的设计,在分析激光腔镜热变形行为的基础上,采用优化镜体结构,提出了一种减少入射激光光斑区域镜面热畸变的途径——热畸变自补偿激光反射镜,并与普通硅镜的热变形情况进行了比较。结果表明,当反射镜反射率为98%、入射激光功率为7kW、激光照射时间分别为2s,4s和10s时,普通硅镜镜面中心与光斑边缘处的热变形之差分别为0.167μm,0.174μm和0.172μm;而热畸变自补偿激光反射镜镜面中心与光斑边缘处的热变形之差分别为0.092μm,0.052μm和0.027μm。该研究结果对提高高能激光腔镜热效应稳定性、改善高能激光光束质量具有一定参考价值。A high-power laser mirror with self-compensation for thermal distortion was presented and numerically simulated on the basis of its thermal deformation behavior after optimizing its substrate structure. When 7kW laser was input in 17era diameter, and the refleetivity of the mirror was 98%, the difference between central maximum thermal distortion and boundary thermal distortion within laser radiation region on the mirror surface for the general silicon substrate （ peak valley values） was 0. 167μm, 0. 174μm and 0. 172μm respectively, under the radiation time of 2s, 4s and 10s. However, the thermal distortion difference （peak valley values ） of the laser mirror with self-compensation of thermal distortions was 0. 092μm, 0. 052μm, 0. 027 μm, respectively. The study results are useful for improving the heat-effective stability and beam quality.

关 键 词：光学器件 激光反射镜 热畸变 自补偿 高能激光 

分 类 号：TN248[电子电信—物理电子学]