不同厚度三倍频SiO_2增透膜的设计、制备与改性  

Design,Preparation and Modification of Third-Harmonic Silica Antireflective Coatings with Different Thickness

作　　者：张雨露[1] 张欣向[1] 业海平[1] 晏良宏[2] 江波[1] 

机构地区：[1]四川大学化学学院绿色化学与技术教育部重点实验室,成都610064 [2]中国工程物理研究院激光聚变研究中心,绵阳621900

出　　处：《无机化学学报》2012年第1期119-124,共6页Chinese Journal of Inorganic Chemistry

基　　金：四川大学中央高校基本科研业务(No.2010SCU23003)资助项目

摘　　要：本文通过光学计算设计了具有不同厚度的三倍频增透膜。以氨水为催化剂、正硅酸乙酯(TEOS)为前驱体,通过溶胶-凝胶(Sol-Gel)技术制得SiO2溶胶;采用浸渍提拉法镀膜得到符合设计要求的三倍频增透膜。研究结果表明,增透膜的耐磨擦性能随着膜层厚度的增大而增大,本文制得的厚度达到200 nm以上的三倍频增透膜耐磨擦性能显著优于传统的1/4波长三倍频增透膜。此外,本文以甲基含氢硅油为膜表面修饰剂,提出一种全新的超快的表面疏水性改性的方法。经该方法处理后,增透膜由亲水膜转变为疏水膜,对水的接触角从23.4°增大至95°,增透膜的耐环境性显著提高。Third-harmonic antireflective （AR） coatings with different thickness were designed via optical formula in this work. Using tetraethylorthosilicate （TEOS） as precursor and ammonia as catalyst, SiO2 sol was prepared by sol-gel process. The designed AR coatings were obtained by dip-coating process. It is found that the abrasion-resistance of AR coatings increased with film thickness, indicating that the abrasion-resistance of third-harmonic AR coatings prepared in this work is much better than that of the traditional quarter-wave third-harmonic AR coating. In addition, a totally new and super-fast surface modification method was proposed by using methyl hydrogen silicone oil as modifier. The water contact angle of AR coating increased from 23.4° to 95° after the surface modification.

关 键 词：溶胶-凝胶技术 三倍频 增透膜 甲基含氢硅油 耐磨擦性 耐环境性 

分 类 号：O613.72[理学—无机化学]