测量线性工作台滚转角误差的多探头法  

A Multi-Probe Method for Roll Error Measurement of Linear Stage

作　　者：韩林[1] 张大卫[1] 

机构地区：[1]天津大学机械工程学院,天津300072

出　　处：《天津大学学报》2012年第2期122-127,共6页Journal of Tianjin University(Science and Technology)

基　　金：国家高技术研究发展计划(863计划)资助项目(2008AA042406);国家科技重大专项资助项目(2009ZX04001-041)

摘　　要：针对线性工作台运动过程中的滚转角误差,提出一种多探头测量方法.与传统的用2个位移传感器和1个具有高平面度的感应物测量滚转角误差的方法相比,所提出的方法利用4个位移传感器,无需高平面度的感应物,更容易实现测量.分析了各项几何误差对传感器读数的影响,利用顺序两点法采集传感器信号.根据传感器融合技术,得到滚转角误差的差分表达式;对测量系统进行了灵敏度和仿真分析.仿真和实验结果表明了该测量方法的可行性.In this paper, a multi-probe method is proposed to measure the roll error of a linear work-table during its movement. Compared with the conventional two-displacement sensor measurement system for which a sensing target with high flatness is required, four sensors are employed in the proposed measurement system and there is no need for a sensing target with high flatness, which results in easier measurement. Influences of individual geometric errors on sensor readings are analyzed, and sequential-two-point method is used to sample signals from sensors. The difference equation for roll error estimation is obtained; moreover, sensitivity of the proposed measurement system and simulation are implemented. Finally, simulation and experimental results show the feasibility of the proposed method.

关 键 词：线性工作台 滚转角误差 位移传感器 顺序两点法 

分 类 号：TG569[金属学及工艺—金属切削加工及机床]