TiN/TiSiN复合涂层显微结构与力学性能研究  

Study on Microstructures and Mechanical Properties of TiN/TiSiN Multilayer Coatings

作　　者：宿福利[1] 高见[2] 李洪林[2] 李祝[1] 宋之敏[1] 

机构地区：[1]四川大学 [2]成都工具研究所有限公司

出　　处：《工具技术》2011年第12期39-43,共5页Tool Engineering

摘　　要：采用工业用直流脉冲等离子体增强化学气相沉积(PCVD)法在硬质合金刀具基体上制备了TiN和TiN/TiSiN复合涂层。对TiN涂层和不同沉积温度下制备的三种TiN/TiSiN复合涂层的微观结构和力学性能进行了对比研究。结果表明:随着沉积温度的升高,TiN/TiSiN复合涂层的结合力增大;沉积温度为550℃时,TiN/TiSiN复合涂层的硬度和耐磨性能优于其他两种TiN/TiSiN复合涂层;复合涂层的显微硬度和耐磨性能均高于单一TiN涂层。The TiN and TiN/TiSiN multilayer coatings were deposited on substrates of WC - Co cutting tools by using indus- trial pulsed d. c. plasma chemical vapor deposition （PCVD） method. The microstructures and mechanical properties of the coatings were investigated. The results show that the adherence of TiN/TiSiN multilayer coatings increased with the depositing temperature increasing. When the temperature is 550℃, the microhardness and the wear property of TiN/TiSiN muhilayer coatings were better than that of TiN/TiSiN multilayer coatings deposited under 500% and 600℃. The microhardness and the wear property of TiN/ TiSiN muhilayer coatings are better than that of single TiN coating.

关 键 词：TiN/TiSiN复合涂层 微观结构 力学性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]