基于可靠性强化试验的硅基压力传感器设计改进  

Design Improvement of Silicon-based Pressure Sensor Based on Reliability Enhancement Test

作　　者：郑浩[1] 李延夫[2] 孙礼[2] 杜健[2] 

机构地区：[1]沈阳仪表科学研究院,辽宁沈阳110043 [2]国家仪器仪表元器件质量监督检验中心,辽宁沈阳110043

出　　处：《仪表技术与传感器》2011年第12期12-13,31,共3页Instrument Technique and Sensor

摘　　要：针对工业控制系统中常用的硅基压力传感器,介绍了可靠性试验分类,可靠性试验应力类型。通过常规试验方法产生的失效模式、失效模式比例,进行进一步的失效机理分析,找出硅基压力传感器设计缺陷及薄弱环节,提出其可靠性强化振动试验方法的理论基础和试验应用模型,并对典型试验方法进行了剖析,并基于试验结果提出了硅基传感器具体设计改进建议。Aimed at the silicon-based pressure sensor,which is widly used in industry control system,this paper introduced the type of reliability test,the type of reliability test stress.Causeing failure mode and proportion of failure mode by conventional test methods,this paper further analyzed the failure mechanism,found out the design flaws and weak links of the silicon-based pressure sensor,and it proposed theory and test application model for vibration reliability enhancement testing,and analyzed typical test methods.This paper proposed some feasible suggestions on improvement based on the test results.

关 键 词：传感器 可靠性 振动试验 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]