Langmuir探针法结合发射光谱法诊断螺旋波低压氢等离子体  

Langmuir probe and emission spectroscopy diagnosis of low pressure hydrogen plasma induced by helicon-wave

作　　者：高映雪[1,2] 吴卫东[1,2] 戴阳[1,2] 姜帆[1,3] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,绵阳621900 [2]西南科技大学理学院,绵阳621010 [3]四川大学原子与分子物理研究所,成都610065

出　　处：《核聚变与等离子体物理》2011年第4期365-371,共7页Nuclear Fusion and Plasma Physics

基　　金：中国工程物理研究院重大基金项目(2005Z0805)

摘　　要：采用Langmuir探针法结合发射光谱法对螺旋波诱导的低压氢等离子体进行诊断,根据Druyvesteyn方法和日冕模型分析电子能量几率函数(EEPF)、有效电子温度(Teff)、电子密度(ne)及激发态氢原子密度(nH*)随实验参数的变化规律。结果表明:随射频功率(Prf)、气压(p)和约束磁场(B)的增大,EEPF峰位由高能向低能移动,Teff下降;当Prf从25W增大至35W左右时,ne发生跳跃增长,而nH*始终随Prf增大线性增长;随p增大,ne和nH*都呈现先增加后减小的变化规律;随B增强,ne线性增长,而nH*先增大后减小。The characteristics of helicon-wave hydrogen low pressure plasma were investigated by Langmuir probe and emission spectroscopy. The variation law of electron energy probability function （EEPF）, effective electron temperature （Teff）, electron density （ne） and hydrogen atom excited state density （nH＊） were analyzed in relation of different experimental parameters by Druyvesteyn method and corona model. The results demonstrate that the peaks of higher energy of EEPF curves move toward lower energy with the increase of RF power, pressure and controlled magnetic field, Teff decreases. The ne increases and jumps with the increase of RF power from 25W to 35W, and the nH increases linearly with the rise of RF power; the ne and nH increases firstly and then decrease with the rise of pressure; with the rise of controlled magnetic field, the ne increase linearly and the nH increases firstly and then decreases.

关 键 词：螺旋波等离子体 LANGMUIR探针 发射光谱 Druyvesteyn方法 日冕模型 

分 类 号：O53[理学—等离子体物理]