集成电极的PDMS-玻璃微流控芯片的制备  

Fabrication of the PDMS-Glass Microfluidic Chip with Integrated Electrodes

作　　者：伍择希[1] 张卫平[1] 陈俊杰[1] 李金凤[1] 陈文元[1] 吴校生[1] 崔峰[1] 刘武[1] 姜川[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术重点实验室,上海200240

出　　处：《微纳电子技术》2012年第1期56-61,共6页Micronanoelectronic Technology

基　　金：国家重点基础研究发展计划(973计划)资助项目(2010CB933901;2011CB933102);教育部新世纪优秀人才支持计划(NCET10-0583)

摘　　要：微流控芯片在分析化学和生物检测方面有着广阔的应用前景。对集成电极的PDMS-玻璃微流控芯片的制备工艺进行了研究与分析。最终使用SU-8快速制备阳模,使用PDMS转移图形得到具有微流控通道的PDMS盖片;在玻璃基板上加工Pt电极,除了需要外露的部分电极外,其他部分以薄层PDMS保护,得到电极基板;将PDMS盖片与电极基板半固化键合制得同时具有加热和温度传导电极以及CE高压电极的PDMS-玻璃芯片。ANSYS模拟分析证明加热芯片热惯性小,加热时温度分布效果好。In the field of the analytical chemistry and biological detection, the microfluidic chip has a broad application prospect. The fabrication process of the PDMS-glass microfluidic chip with integrated electrodes was researched and analyzed. The male mould was made by SU - 8, and the PDMS cover plate with microfluidic channels was obtained by the PDMS transferred pat tern. Through processing the Pt electrode on the glass substrate and protecting the Pt electrode with the thin layer PDMS except the part of the exposed electrode, the electrode substrate was obtained. By half-curing bonding of the PDMS cover plate and electrode substrate, the PDMS- glass chip with heating electrodes, temperature detecting electrodes and high-voltage CE elec trodes was obtained. The ANSYS simulation analysis shows that the thermal inertia is small and the tempe-rature distribution effect is good when the chip is heated.

关 键 词：集成电极 PDMS-玻璃 微流控芯片 生物芯片 聚合酶链式反应(PCR) 毛细管电泳(CE) ANSYS模拟 

分 类 号：TH703[机械工程—仪器科学与技术] O35[机械工程—精密仪器及机械]