高精度压力传感器中温度补偿技术研究  

Research of Temperature Compensation on High Accuracy Pressure Sensors

作　　者：卞金洪[1] 王吉林[1] 周锋[1,2] 

机构地区：[1]盐城工学院信息工程学院,江苏盐城224051 [2]东南大学信息科学与工程学院,江苏南京210096

出　　处：《哈尔滨理工大学学报》2011年第6期55-57,共3页Journal of Harbin University of Science and Technology

基　　金：国家自然科学基金(60975017);江苏省自然科学基金(BK2008291);盐城工学院科研项目(XKY2011034)

摘　　要：半导体的温度特性会使压阻式压力传感器的零点和灵敏度随温度而发生漂移,是造成压力传感器测量误差的主要因素.对于高精度压力检测系统,温度漂移已成为提高其系统性能的重要障碍,在环境温度变化较大的应用领域更是如此.在分析多种温补方法优缺点的基础上,提出了一种结合多项式曲线拟合和三次样条插值的温度补偿方法,可以较好地提高测量压力的精确度,提升压力测量系统性能.The temperature characteristics of semiconductor will make zero and sensitivity of pressure sensor drift with temperature.It is the main factor that causes measurement error of pressure sensor.For high precision pressure detection systems,especially in applications that temperature changes greatly,temperature drift has become a major obstacle to improve their system performance.This paper analyzes the advantages and disadvantages of a variety of temperature compensation methods,and proposes one that combines curve fitting and cubic spline interpolation.This method can improve the system performance.

关 键 词：压力传感器 温度补偿 曲线拟合 样条插值 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]