化学镀铁工艺中络合剂用量的优化实验  

Optimized Study on the Amount of Complexing Agents in Electroless Iron Plating Process

作　　者：张敏[1] 李林泽[1] 何为[1] 胡文成[1] 万小波[2] 张云望[2] 杜凯[2] 张林[2] 

机构地区：[1]电子科技大学微电子与固体电子学院,成都610054 [2]中国工程物理研究院激光聚变中心,四川绵阳621900

出　　处：《实验科学与技术》2011年第6期4-6,共3页Experiment Science and Technology

基　　金：国家自然科学基金委员会与中国工程物理研究院联合基金资助(10976006)

摘　　要：通过化学镀铁工艺构建应用于惯性约束核聚变实验用铁黑腔,在化学镀铁镀液配方中,络合剂是镀速和镀层孔隙率重要的影响因素。文中首先通过单一络合物实验初步得出了柠檬酸钠、乳酸和丙酸的初步范围,并通过正交试验优化了化学镀铁溶液中各络合物浓度,并讨论了不同浓度的络合剂对镀速和镀层孔隙率的影响关系。The iron hohlraum applied in inertial confinement fusion（ICF） experiment has been fabricated by an electroless iron plating route.The composition and amount of complexing agents in electroless iron baths are the key factors in plating rate and porosity of coatings.The preliminary concentration range of sodium citrate,lactic acid,or propionic acid was investigated through an experiment adding only one complexing agent to the plating bath,respectively.An orthogonal test was employed to optimize the amounts of composite complexing agents in electroless iron plating bath.In addition,the effects of different concentrations of complexing agents on plating rate and porosity of coatings were also been discussed in detail.

关 键 词：化学镀铁 黑腔 复合络合剂 正交试验 

分 类 号：TQ153[化学工程—电化学工业] G642.423[文化科学—高等教育学]