四轴非正交位移传感器电路的设计分析  

Design and analysis of four axis non-orthogonal displacement sensor circuit

作　　者：王乐乐[1] 王晖[1] 刘建华[1] 王秋良[1] 李献[1] 

机构地区：[1]中国科学院研究生院电工研究所,北京100190

出　　处：《传感器与微系统》2012年第1期117-119,123,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(50577063;50504013)

摘　　要：针对压控型八电极静电悬浮支承系统位移测量难的特点,设计了一种四轴非正交位移传感器电路。分析了四轴非正交位移传感器的测量原理,给出了保证转子地电位的方法,分析了位移测量的系统灵敏度,设计出位移传感器电路,并给出一种从支承高电压中分离位移信号的电路。实验证明:该位移传感器可以准确检测出转子的偏移,提高测量精度,达到了设计要求,为八电极静电悬浮系统的测量提供了可靠的保证。Aiming at the characteristic that it is difficult to measure the displacement in constant-voltage control electrostatic suspension system with eight electrodes, a kind of displacement sensor circuit is designed. The working principle of the four axis displacement sensor is analyzed. The method which ensures the rotor ground potential is given. The system sensitivity of four axis non-orthogonal displacement measurement is analyzed. The circuit of displacement sensor is designed. The circuit of separating displacement signal from the bearing high- voltage are designed. Test results show that the displacement sensor can measure displacement of the rotor accurately and improves measurement precision to a certain extent and meets the design requirements. It also provides a reliable guarantee for displacement measurement in electrostatic suspension system with eight electrodes.

关 键 词：位移传感器 四轴非正交 八电极 悬浮系统 

分 类 号：TP206.1[自动化与计算机技术—检测技术与自动化装置]