非共振光声CO_2气体检测系统  

A nonresonant photoacoustic system for CO_2 detection

作　　者：管人宝[1] 何秀丽[1] 高晓光[1] 赵玲[1] 李建平[1] 贾建[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190

出　　处：《传感器与微系统》2012年第2期96-98,101,共4页Transducer and Microsystem Technologies

基　　金：国家高技术研究发展计划资助项目(2009AA04Z328)

摘　　要：非共振光声红外气体检测系统结构简单、成本低,有很好的应用前景。设计和制备了基于MEMS电调制光源、驻极体麦克风和单腔室及双腔室非共振光声探测器的气体检测系统。根据系统的频率响应特性选择了最佳的光源调制频率,并对不同体积分数的CO2气体进行了测试。相对于传统的单腔室结构,设计的双腔室结构有效提高了系统的响应信号幅值,并降低了气体检测限,单腔室系统的检测限约为7.2×10-6,双腔室系统的检测限约为2.1×10-6。Photoacoustic spectroscopy （PAS）is a very attractive technique for gas detection. Nonresonant photoaeoustic gas detection system shows good expectation because of the simple structure and low cost. A gas detection system based on a MEMS infrared emitter, an electret microphone and a nonresonant optoaeoustic detector with single and double chamber has been built and the gas sensing properties for different volume fraction CO2 have been tested with the optimum frequency of the infrared source emitter. The nonresonant optoacoustic detector with double chambers shows higher signal intensity and lower detection limit than the detector with conventional single chamber. The detection limit of the single chamber detector system is about 7.2 ×10^-6, and the double chamber detector system is about 2.1×10^-6

关 键 词：非共振光声 非分散红外 CO2气体检测 

分 类 号：TN215[电子电信—物理电子学]