氧化铝-8YSZ叠层制备极限电流型氧传感器  

Study on limiting current oxygen sensor made with 8YSZ and Al_2O_3 as electrolyte and supporting layer

作　　者：周贞[1] 吴翔[1] 简家文[1] 

机构地区：[1]宁波大学信息科学与工程学院,浙江宁波315211

出　　处：《电子元件与材料》2012年第2期18-21,共4页Electronic Components And Materials

基　　金：国家自然科学基金资助项目(No.60971074);浙江省自然科学基金资助项目(No.Y1080430)

摘　　要：采用氧化铝作支撑材料制备了一种新型结构的极限电流型氧传感器。该传感器经由氧化铝粉和8YSZ粉分别压片并烧结成瓷，再经厚膜丝网印刷及叠压共烧制成。在温度为973K（700℃）、氧体积分数为1．4％～14％条件下，对该传感器的气敏特性和响应时间进行了研究。结果表明：该传感器在上述氧浓度范围内具有较好的电流平台特性，且极限电流与氧浓度有良好的线性关系；气体在该传感器中的扩散为Knudsen扩散；该传感器的响应时间在8s以内且呈现较好的重复性，长时间工作性能较稳定。A limiting current oxygen sensor with a novel structure was fabricated with Al2O3 as supporting material. The Al2O3 and 8YSZ powders were respectively pressed and sintered to ceramic chips with different sizes, and then the sensor was fabricated by screen printing and multilayered co-firing the chips. The response time andⅠ-Ⅴcurve of the sensor were studied at 973 K（700 ℃ ）and an oxygen concentration of 1.4%-14% （volume fraction）. The results show that, under the employed testing condition, limiting current platforms clearly present in the Ⅰ-Ⅴ curves of the sensor, and the limiting current is linearly proportional to the oxygen concentration. Moreover, the diffusion of gas in the sensor obeys the Knudsen diffusion model. The response time of the sensor is below 8 s and shows good repeatability, leading to a stable long-term performance.

关 键 词：氧化铝 氧传感器 极限电流 响应时间 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]