Comparative Investigation of Mo（CO）6 Adsorption on Clean and OxidiZed Si（111） Surfaces  

Mo（Co）6在清洁的和氧化的Si（111）表面上吸附的对比

作　　者：姜志全[1] 黄伟新[1] 

机构地区：[1]中国科学院能量转换材料重点实验室,中国科学技术大学合肥微尺度物质科学国家实验室,化学物理系,合肥230026

出　　处：《Chinese Journal of Chemical Physics》2011年第6期729-734,I0004,共7页化学物理学报（英文）

摘　　要：Mo（CO）6 adsorption on the clean, oxygen-precovered and deeply oxidized Si（lll） surfaces was comparatively investigated by high-resolution electron energy loss spectroscopy. The downward vibrational frequency shift of the C-O stretching mode in adsorbed Mo（CO）6 illustrates that different interactions of adsorbed Mo（CO）6 occur on clean Si（111） and SiO2/Si（111） surfaces, weak on the former and strong on the latter. The strong interaction on SiO2/Si（111） might lead to the partial dissociation of Mo（CO）6, consequently the formation of molybdenum subcarbonyls. Therefore, employing Mo（CO）6 as the precursor, metallic molybdenum could be successfully deposited on the SiO2/Si（111） surface but not on the clean Si（111） surface. A portion of the deposited metallic molybdenum is transformed into the MoOa on the SiO2/Si（111） surface upon heating, and the evolved MoO3 finally desorbs from the substrate upon annealing at elevated temperatures.

关 键 词：Molybdenum hexacarbonyl SiO2/Si（111） Interaction High-resolution electron energy loss spectroscopy 

分 类 号：O[理学]