Fabrication and characterization of implantable silicon neural probe with microfluidic channels  

作　　者：GUO Kai PEI WeiHua LI XiaoQian GUI Qiang TANG RongYu LIU Jian CHEN HongDa 

机构地区：[1]State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

出　　处：《Science China(Technological Sciences)》2012年第1期1-5,共5页中国科学（技术科学英文版）

基　　金：supported by the National Basic Research Program of China("973" Project) (Grant Nos. 2011CB933203, 2011CB933102);the National Natural Science Foundation of China (Grant Nos.31070965,90820002,60877035,60976026 and 61076023)

摘　　要：In this paper, a silicon-based neural probe with microfluidic channels was developed and evaluated. The probe can deliver chemicals or drugs to the target neurons while simultaneously recording the electrical action of these neurons extracellularly. The probe was fabricated by double-sided deep reactive ion etching （DRIE） from a silicon-on-insulator （SO1） wafer. The flu- idic channels were formed with V-shape groove etching on the silicon probe and sealed with silicon nitride and parylene-C. The shank of the probe is 4 mm long and 120 ~tm wide. The thickness of the probe is 100 ~tm. The probe has two fluidic chan- nels and two recording sites. The microfluidic channels can withstand a pressure drop as much as 30 kPa and the flow resisti ity of the microfluidic channel is 0.13 μL min-1 kPa-1, The typical impedance of the neural electrode is 32.3 kΩ at 1 kHz at room temperature.

关 键 词：neural probe parylene-C microfluidic channel 

分 类 号：TH[机械工程]