Superior tribological properties of an amorphous carbon film with a graphite-like structure  

作　　者：Wang Yong-Jun Li Hong-Xuan Ji Li Liu Xiao-Hong Wu Yan-Xia Zhou Hui-Di Chen Jian-Min 王永军;李红轩;吉利;刘晓红;吴艳霞;周惠娣;陈建敏(State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;Graduate University of the Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China [2]Graduate University of the Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Chinese Physics B》2012年第1期320-328,共9页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant Nos.50705093 and 50575217);the Innovative Group Foundation of the National Natural Science Foundation of China(Grant No.50421502);the National Basic ResearchProgram of China(Grant No.2007CB607601)

摘　　要：Amorphous carbon films with high sp2 concentrations are deposited by unbalanced magnetron sputtering with a narrow range of substrate bias voltage. Field emission scanning electron microscopes （FESEMs）, high resolution transmission electron microscopes （HRTEMs）, atomic force microscopes （AFMs）, the Raman spectrometers, nano- indentation, and tribometers are subsequently used to characterize the microstructures and the properties of the resulting films. It is found that the present films are dominated by the sp2 sites. However, the films demonstrate a moderate hardness together with a low internal stress. The high hardness of the deposited film originates from the crosslinking of the sp2 clusters by the sp3 sites. The presence of the graphite-like clusters in the film structure may be responsible for the low internal stress. What is more important is that the resulting films show excellent tribological properties with high load capacity and excellent wear resistance in humid atmospheres. The relationship between the microstructure determined by the deposition condition and the film characteristic is discussed in detail.Amorphous carbon films with high sp2 concentrations are deposited by unbalanced magnetron sputtering with a narrow range of substrate bias voltage. Field emission scanning electron microscopes （FESEMs）, high resolution transmission electron microscopes （HRTEMs）, atomic force microscopes （AFMs）, the Raman spectrometers, nano- indentation, and tribometers are subsequently used to characterize the microstructures and the properties of the resulting films. It is found that the present films are dominated by the sp2 sites. However, the films demonstrate a moderate hardness together with a low internal stress. The high hardness of the deposited film originates from the crosslinking of the sp2 clusters by the sp3 sites. The presence of the graphite-like clusters in the film structure may be responsible for the low internal stress. What is more important is that the resulting films show excellent tribological properties with high load capacity and excellent wear resistance in humid atmospheres. The relationship between the microstructure determined by the deposition condition and the film characteristic is discussed in detail.

关 键 词：magnetron sputtering graphite-like carbon film MICROSTRUCTURE performance 

分 类 号：TB383.2[一般工业技术—材料科学与工程]