Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints  

作　　者：ZHOU Bing-hai LI Xin 周炳海;李鑫(School of Mechanical Engineering,Tongji University,Shanghai 201804,China;Department of Systems Engineering and Engineering Management,City University of Hong Kong,Hong Kong,China)

机构地区：[1]School of Mechanical Engineering,Tongji University,Shanghai 201804,China [2]Department of Systems Engineering and Engineering Management,City University of Hong Kong,Hong Kong,China

出　　处：《Journal of Central South University》2012年第1期187-192,共6页中南大学学报（英文版）

基　　金：Projects(71071115,60574054) supported by the National Natural Science Foundation of China

摘　　要：To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools.Firstly,mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain.Resource conflicts were analyzed in the built scheduling model,and policies to solve resource conflicts were built.A scheduling algorithm was developed.Finally,the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations.Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.To improve the productivity of cluster tools in semiconductor fabrications, on the basis of stating scheduling problems, a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools. Firstly, mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain. Resource conflicts were analyzed in the built scheduling model, and policies to solve resource conflicts were built. A scheduling algorithm was developed. Finally, the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations. Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.

关 键 词：cluster tools residency constraints scheduling model ALGORITHM simulation experiments 

分 类 号：TH186[机械工程—机械制造及自动化]