Fabrication of high aspect ratio microfiber arrays that mimic gecko foot hairs  

作　　者：LIU ShiYuan ZHANG Peng LUE Hao ZHANG ChuanWei XIA Qi 

机构地区：[1]Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China [2]State Key Laboratory of Digital Manufacturing Equipment and Technology,Huazhong University of Science and Technology,Wuhan 430074,China

出　　处：《Chinese Science Bulletin》2012年第4期404-408,共5页

基　　金：supported by the National Natural Science Foundation of China(91023032,51005091,50775090);the Fundamental Research Funds for the Central Universities of China(2010ZD004);the Postdoctoral Science Foundation of China(20100470052)

摘　　要：In nature, geckos have developed complex adhesion structures capable of smart adhesion, which is the ability to cling to different smooth and rough surfaces, even ceilings, and detach at will. The hierarchical structure of gecko foot hairs consists of microscale setae, branches and nanoscale spatulae, which contributes to their strong adhesion on different surfaces. In this paper, we propose a simple and low-cost method for fabricating two-level high aspect ratio microfiber arrays that mimic gecko foot hairs. SU-8 photoresist was used and single-level SU-8 microfiber arrays were obtained by a thick film photolithography process. Single-level polydimethyl-siloxane (PDMS) microfiber arrays were also obtained by a micromolding process and the master template for this process was fabricated using inductively coupled plasma (ICP) technology. Using the silicon mold with deep-hole arrays as a substrate, an SU-8 layer with microhole arrays was added to it using thick film photolithography and it formed a double stack mold from which the two-level hierarchical PDMS microfiber arrays were replicated. Water contact angle tests showed that the two-level hierarchical structures are extremely hydrophobic (about 148.5° compared with the Tokay gecko's 160°).In nature, geckos have developed complex adhesion structures capable of smart adhesion, which is the ability to cling to different smooth and rough surfaces, even ceilings, and detach at will. The hierarchical structure of gecko foot hairs consists of microscale setae, branches and nanoscaie spatulae, which contributes to their strong adhesion on different surfaces. In this paper, we propose a simple and low-cost method for fabricating two-level high aspect ratio microfiber arrays that mimic gecko foot hairs. SU-8 photoresist was used and single-level SU-8 microfiber arrays were obtained by a thick film photolithography process. Single-level polydimethyl-siloxane （PDMS） microfiber arrays were also obtained by a micromolding process and the master template for this process was fabricated using inductively coupled plasma （ICP） technology. Using the silicon mold with deep-hole arrays as a substrate, an SU-8 layer with microhole arrays was added to it using thick film photolithography and it formed a double stack mold from which the two-level hierarchical PDMS microfiber arrays were replicated. Water contact angle tests showed that the two-level hierarchical structures are extremely hydrophobic （about 148.5° compared with the Tokay gecko＇s 160°）.

关 键 词：微孔阵列 超细纤维 高宽比 壁虎 模仿 聚二甲基硅氧烷 电感耦合等离子体 表面附着力 

分 类 号：O634.41[理学—高分子化学] TG665[理学—化学]