Humidity sensing properties of Ce-doped nanoporous ZnO thin film prepared by sol-gel method  

作　　者：Mansoor Anbia Seyyed Ebrahim Moosavi Fard 

机构地区：[1]Research Laboratory of Nanoporous Materials,Faculty of Chemistry,Iran University of Science and Technology,Farjam Street,Narmak,Tehran 16846,Iran

出　　处：《Journal of Rare Earths》2012年第1期38-42,共5页稀土学报（英文版）

摘　　要：The humidity sensitive characteristics of the sensor fabricated from Ce-doped nanoporous ZnO by screen-printing on the alumina substrate with Ag-Pd interdigital electrodes were investigated at different sintering temperatures.The nanoporous thin films were prepared by sol-gel technique.It was found that the impedance of the sensor sintered at 600 oC changed more than four order of magnitude in the relative humidity（RH） range of 11%-95% at 25 oC.The response and recovery time of the sensor were about 13 and 17 s,respectively.The sensor showed high humidity sensitivity,rapid response and recovery,prominent stability,good repeatability and narrow hysteresis loop.These re-sults indicated that Ce-doped nanoporous ZnO thin films can be used in fabricating high-performance humidity sensors.The humidity sensitive characteristics of the sensor fabricated from Ce-doped nanoporous ZnO by screen-printing on the alumina substrate with Ag-Pd interdigital electrodes were investigated at different sintering temperatures.The nanoporous thin films were prepared by sol-gel technique.It was found that the impedance of the sensor sintered at 600 oC changed more than four order of magnitude in the relative humidity（RH） range of 11%-95% at 25 oC.The response and recovery time of the sensor were about 13 and 17 s,respectively.The sensor showed high humidity sensitivity,rapid response and recovery,prominent stability,good repeatability and narrow hysteresis loop.These re-sults indicated that Ce-doped nanoporous ZnO thin films can be used in fabricating high-performance humidity sensors.

关 键 词：humidity sensing nanoporous ZnO Ce-doped rare earths 

分 类 号：TB383.2[一般工业技术—材料科学与工程]