TDX-200F透射电镜高压测试系统的设计与应用  

The design of TEM high-voltage power test system

作　　者：董全林[1] 于成交[1] 杨彦杰[1] 袁水平[1] 吴国增[1] 张春熹[1] 姚骏恩[1] 许春兰[2] 王爱民 

机构地区：[1]北京航空航天大学微纳测控与低维物理教育部重点实验室,仪器科学与光电工程学院,北京100191 [2]北京电子科技职业学院,北京100036 [3]国营红峰机械厂,湖北孝感432000

出　　处：《电子显微学报》2011年第6期567-570,共4页Journal of Chinese Electron Microscopy Society

基　　金：国家科技支撑计划课题(2006BAK03A24)

摘　　要：本文针对加速电压稳定度、电压值及加速电压纹波值性能指标设计了TDX-200F透射电镜高压电源测试系统。首先阐述了系统的工作原理,然后根据基本测试功能和主要技术指标设计了高压测试系统。该系统采取虚拟仪器技术,大大提高测试效率,经过现场调试,现已用于新研制的TDX-200F场发射枪透射电子显微镜高压系统测试中。实验证明该测试系统稳定、可靠,可用于高压电源系统性能指标的测试。This paper introduces a transmission electron microscope（TEM） high-voltage power supply testing system.The design mainly aimed at accelerating voltage stability,voltage value,and the value of accelerating voltage ripple performance.First,the working principle of the system was described,and then a system was designed according to the basic functions and the main technical indicators of TEM high-voltage power supply test system.The system greatly improved the efficiency of the test by adopting the virtual instrument technology.After the commissioning,the system was applied to the high-voltage power supply test system of national scientific and technological support projects ＂TDX-200F field emission gun transmission electron microscope development＂.Testing results showed that the test system was reliable,and it could be used for the performance test of high-voltage system power supply.

关 键 词：透射电子显微镜 高压测试系统 电压稳定度 电压纹波值 

分 类 号：TN16[电子电信—物理电子学] TM835[电气工程—高电压与绝缘技术]