Si基集成光学陀螺中弯曲波导特性研究  

Study on curve waveguide in silicon-based integrated optical gyro

作　　者：于怀勇[1] 张春熹[1,2] 冯丽爽[1,2] 王俊杰[1] 李儒雅[1] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100191 [2]北京航空航天大学微纳测控与低维物理教育部重点实验室,北京100191

出　　处：《光电子．激光》2012年第1期60-66,共7页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(50875015)资助项目

摘　　要：给出了Si基集成光学陀螺的光路结构,理论计算了余弦型弯曲波导的弯曲半径和弯曲损耗。仿真分析了弯曲波导的宽度、长度与弯曲损耗的关系,进而设计了集成光学陀螺用"K"形耦合器,并通过R-soft软件进行了仿真分析。搭建了弯曲波导的实验测试装置,分别测试了弯曲波导的传输损耗与光模场,结果表明,波导单位损耗为0.014dB/cm,验证了理论计算结果的正确性。采用光束扫描法测试了弯曲波导的模场,实验结果与理想高斯拟合曲线吻合。The scheme of silicon-based integrated optical gyroscope is proposed firstly,and the curve radius and transmission loss of the curve waveguide are calculated theoretically.The essential parameters which are the width and length,are simulated with the relationship with transmission loss,and the ＂K＂ shape coupler is designed by the R-soft simulation based on the theoretical analysis result.The experimental setup is constructed,and the loss and the optical mode are tested,respectively.The loss measurement results show that the loss is 0.014 dB/cm,which validates the theoretical calculation result that the transmission can be neglected when the ratio of l2/h is greater than 5 000.Finally,the optical mode is tested by beam-scan,which shows the perfect fitting result with the ideal Gauss mode curve.

关 键 词：集成光学陀螺 弯曲波导设计 仿真分析 

分 类 号：TH74[机械工程—光学工程]