5英寸半球形微通道板光电倍增管的设计与研制  

The Design and Research of the 5-inch Semi-Spherical MCP-PMT

作　　者：王晓耘[1] 温增福[1] 李慧蕊[1] 

机构地区：[1]中国电子科技集团公司第五十五研究所,江苏南京210016

出　　处：《真空电子技术》2011年第6期12-15,25,共5页Vacuum Electronics

摘　　要：简述了5英寸半球形微通道板光电倍增管(简称:5″半球形MCP-PMT)的电子光学系统设计和优化试验;整管结构设计、工艺路径设计和光电参数设计。介绍了研制过程中,为确保MCP的增益特性和增益的稳定性,针对暗发射、真空性能等所采取的技术措施和相关工艺;分析产生暗电流(Id)和Id稳定性差(跳动)的各种因素,进行多次试验验证,解决了降低Id并使之趋于稳定的关键技术,优化了相关结构,在正常工作条件下,可达到Id≤30nA。为使器件更适用于进行单光子探测,本文还提出了研制量子效率更高、时间特性更好的全球形MCP-PMT的发展方向。The electro-optical system of 5-inch semi-spherical micro-channel plates photo-multiplier tube（5＂semi-spherical MCP-PMT） was designed and optimized by experiments.The structure design,technical process and the electro-optical parameter setting are introduced.In order to get good MCP gain characteristics and gain stability,lots of technical measures and relative experiments were carried out to improve the dark-emission and the vacuum degree.Various reasons causing the dark current（Id） and poor Id stability（jitter） were analyzed by lots of experiments for decreasing Id and making it tend to be stable.After optimizing the structure,the Id of the tube can be less than 30nA under normal work conditions. For better application to the single-photon detection,the developing trend of full-spherical MCP-PMT which has better quantum efficiency and temporal characteristics is also introduced.

关 键 词：微通道板光电倍增管 电子光学系统 光电阴极 

分 类 号：TN23[电子电信—物理电子学]