光学镜面化学镀银中的敏化工艺研究  

The Sensitization Technology of Chemical Silvering for Optical Surfaces

作　　者：龚秀明[1] 吴时彬[1] 景洪伟[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209

出　　处：《光电工程》2012年第2期130-133,共4页Opto-Electronic Engineering

摘　　要：介绍了光学镜面化学镀银工艺的基本流程及对膜层质量影响较大的敏化工序的原理和工艺,并对该工序中的喷水量进行了理论计算和实验验证。对一块Φ365mm口径的次镜进行镀膜实验。实验结果表明,均匀喷雾35s左右能洗净敏化液中的Cl-,并使水解生成的Sn(OH)2胶体均匀残留于镜面,镀制的Ag膜层质量较好。膜层检测结果为:反射率为92%,厚度为60nm,对面形的影响:PV=λ/45,RMS=λ/250,满足该次镜的检测精度要求。The basic procedure for the chemical silvering for optical surfaces is introduced, the principle and technology of the sensitization is reported, and the theoretical analysis and experimental validation of water spraying is given. An experiment was performed using a secondary mirror with 365mm in diameter. By spraying water for 35 seconds, the Cl-in sensitizer can be cleaned thoroughly, and the Sn（OH）2 gelinite is left on the optical surface uniformly. The silver coating is very good. The silver coating has the 92% reflectivity, 60nm thickness, PV=λ/45 and RMS=λ/250 in surface change, which meets the coating requirements for the secondary mirror.

关 键 词：光学镜面 化学镀银 敏化 

分 类 号：TN804[电子电信—信息与通信工程]