一种新型MEMS矢量水听器的设计  

Design of a Novel Vector Hydrophone Based on MEMS

作　　者：许姣[1,2] 李俊[1] 张国军[1,2] 石归雄[2] 张文栋[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中北大学电子测试技术重点实验室,山西太原030051

出　　处：《压电与声光》2012年第1期89-92,共4页Piezoelectrics & Acoustooptics

基　　金：国际科技合作基金资助项目(2010DFB10480)

摘　　要：针对国内对高灵敏、小体积、造价低的矢量水听器迫切应用需求的现状,提出了一种新型的双"T"型微机电系统(MEMS)矢量水听器。该敏感单元结构可一体化加工,且加工成本低,适合大批量生产,易于阵列化。采用ANSYS仿真,得出1阶共振频率为1 840Hz,压敏电阻位置距离梁根部180μm。对此结构进行声学封装与测试,测试结果表明,该水听器在1kHz的灵敏度达到-175dB,工作频段为100Hz～4kHz,具有良好的"8"指向性。In view of the urgent demand of high sensitivity,mall volume and inexpensive vector hydrophone in domestic,a novel double T-shaped vector hydrophone is proposed.The structure can be integrated fabricated,which is suit for lot manufacturing and multiple arrays.This paper simulated the novel structure by ANSYS.It could be concluded that resonance frequency was 1 840 Hz and the position of the piezo-resistor was away from edges about 180 m.The prototype of the vector hydrophone was fabricated and preliminary characterization tests of the hydrophone were performed.Results showed that the sensitivity was-175 dB at 1 kHz and frequency response ranged from 100 Hz to 4 kHz,possessing satisfactory directional pattern in the form of ＂8＂ shape.

关 键 词：矢量水听器 微机电系统(MEMS) 封装与测试 ANSYS 

分 类 号：TN40[电子电信—微电子学与固体电子学] TB565.1[交通运输工程—水声工程]