Design of Magnetic RF Inductor in CMOS  

作　　者：Jing Zhan Tianling Ren Chen Yang Yi Yang Litian Liu Albert Wang 

机构地区：[1]nghua National Laboratory for Information Science and Technology,Institute of Microelectronics,Tsinghua University,Beijing 100084,China [2]Shanghai Institute of Microsystem and Information Technology,State Key Laboratory of Transducer Technology,Shanghai 200050,China [3]Department of Electrical Engineering,University of California,Riverside,CA 92521,USA

出　　处：《Tsinghua Science and Technology》2012年第1期78-83,共6页清华大学学报（自然科学版（英文版）

基　　金：Supported by the National Natural Science Foundation of China(Nos. 61025021, 60936002, 60729308, 61011130296, and 61020106006);the National Key Projects of Science and Technology of China (No. 2009ZX02023-001-3)

摘　　要：Traditional planar inductors in Radio Frequency （RF） Integrated Circuits （ICs） are plagued by large areas, low quality, and low frequencies. This paper describes a magnetic-based CMOS-compatible RF in- ductor. Magnetic-core inductors with various ferrite-filled structures, spiral structures, and magnetic material permeabilities were simulated to show that this inductor greatly improves the inductance by up to 97% and quality factor by 18.6% over a multi-GHz frequency range. The results indicate that the inductor is a very promising and viable solution to realize miniature, high quality, and high frequency on-chip inductors for high-end RF ICs.Traditional planar inductors in Radio Frequency （RF） Integrated Circuits （ICs） are plagued by large areas, low quality, and low frequencies. This paper describes a magnetic-based CMOS-compatible RF in- ductor. Magnetic-core inductors with various ferrite-filled structures, spiral structures, and magnetic material permeabilities were simulated to show that this inductor greatly improves the inductance by up to 97% and quality factor by 18.6% over a multi-GHz frequency range. The results indicate that the inductor is a very promising and viable solution to realize miniature, high quality, and high frequency on-chip inductors for high-end RF ICs.

关 键 词：INDUCTOR FERRITE magnetic-cored Radio Frequency （RF） Integrated Circuits （ICs） 

分 类 号：TM15[电气工程—电工理论与新技术] TN432[电子电信—微电子学与固体电子学]