Influence of Annealing Time on the Microstructure and Properties of Pb(Zr_(0.53)Ti_(0.47))O_3 Thin Films  

作　　者：HUANG Ling MAO Wei HUANG Zhixiong SHI Minxian MEI Qinlin 黄玲;MAO Wei;HUANG Zhixiong;SHI Minxian;MEI Qinlin(School of Materials Science and Engineering,Wuhan University of Technology,Wuhan 430070,China)

机构地区：[1]School of Materials Science and Engineering,Wuhan University of Technology,Wuhan 430070,China

出　　处：《Journal of Wuhan University of Technology(Materials Science)》2012年第1期88-91,共4页武汉理工大学学报（材料科学英文版）

基　　金：Supported by the National Natural Science Foundation of China (No. 50772083);China-Japan Cooperation Program(No. 2010DFA51270);the Fundamental Research Funds for the Central Universities

摘　　要：The PZT thin films were prepared on （111）- Pt/Ti/SiO2/Si substrates by sol-gel method, and lead acetate [Pb（CH3COO）2], zirconium nitrate [Zr（NO3）4] were used as raw materials. The X-ray diffractometer （XRD） and scanning electron microscopy （SEM） were used to characterize the phase structure and surface morphology of the films annealed at 650 ~C but with different holding time. Ferroelectric and dielectric properties of the films were measured by the ferroelectric tester and the precision impedance analyzer, respectively. The PZT thin films were constructed with epoxy resin as a composite structure, and the damping properties of the composite were tested by dynamic mechanical analyzer （DMA）. The results show that the films annealed for 90 minutes present a dense and compact crystal arrangement on the surface; moreover, the films also achieve their best electric quality. At the same time, the largest damping loss factor of the composite constructed with the 90 mins-annealed film shows peak value of 0.9, hi^her than the pure epoxy resin.The PZT thin films were prepared on （111）- Pt/Ti/SiO2/Si substrates by sol-gel method, and lead acetate [Pb（CH3COO）2], zirconium nitrate [Zr（NO3）4] were used as raw materials. The X-ray diffractometer （XRD） and scanning electron microscopy （SEM） were used to characterize the phase structure and surface morphology of the films annealed at 650 ~C but with different holding time. Ferroelectric and dielectric properties of the films were measured by the ferroelectric tester and the precision impedance analyzer, respectively. The PZT thin films were constructed with epoxy resin as a composite structure, and the damping properties of the composite were tested by dynamic mechanical analyzer （DMA）. The results show that the films annealed for 90 minutes present a dense and compact crystal arrangement on the surface; moreover, the films also achieve their best electric quality. At the same time, the largest damping loss factor of the composite constructed with the 90 mins-annealed film shows peak value of 0.9, hi^her than the pure epoxy resin.

关 键 词：sol-gel method Pb（Zr0.53Ti0.47）O3 thin film surface feature ferroelectric and dielectricproperty damping property 

分 类 号：TB383.2[一般工业技术—材料科学与工程]