带非线性预校正功能的偏振光位移传感器  

A Polarized Light Rectilinear Displacement Sensor with Nonlinear Precorrection

作　　者：李伟[1] 路甬祥[1] 

机构地区：[1]浙江大学流体传动及控制国家重点实验室,杭州310027

出　　处：《仪器仪表学报》2000年第1期58-60,65,共4页Chinese Journal of Scientific Instrument

基　　金：浙江省自然科学基金

摘　　要：本文提出了一种基于偏振光检测的直线位移传感器 ,它具有非线性预校正的功能。介绍了检测与结构原理 ,并给出了原理装置的实验结果。这种新型位移传感器具有光机电结合、结构简单、非接触传感等特点。通过在变换结构中引入非线性预校正的方法 ,使输出电量与被测位移量在理论上呈线性关系 ,不仅扩大了量程 ,简化了电路 。A new type of rectilinear displacement sensor which is based on the principle of polarized light detection is introduced in this paper. The sensor consists of three parts, including optical, mechanical and electronic structures. The method of nonlinear precorrection (inverse function) is applied to the sensor. As a result, the even sensitivities and accuracies in the whole measuring range are obtained. The theoretic analyses and experiment data given in the paper indicate that the electrical output is entirely proportional to the rectilinear displacement measured. It deserves to be mentioned that the sensor has the characteristics of non-contact measurement, simple structure and extensive measuring range.

关 键 词：直线位移传感器 线偏振光检测 非线性校正 

分 类 号：TH822.032[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]