〈100〉正面开口快速湿法腐蚀释放悬浮结构的研究  

〈100〉 Direction Released Membrane Structure by Fast Front-etching

作　　者：马铁英[1] 李劲松[1] 梁培[1] 

机构地区：[1]中国计量学院光学与电子科技分院,杭州310018

出　　处：《固体电子学研究与进展》2012年第1期58-63,共6页Research & Progress of SSE

基　　金：国家自然科学基金青年科学基金资助项目(61006051);国家自然科学基金资助项目(60878024)

摘　　要：设计了三种正向开口方式为〈100〉向折线型、长条型、长短条复合型的悬浮膜系。在水浴温度80°C条件下,120min后,〈100〉开口膜系由50%KOH溶液各向异性腐蚀快速释放成形,获得完整无粘连的悬浮结构。在〈100〉快速腐蚀释放原理基础上,制备了基于〈100〉开口的测辐射热计与红外热电堆悬浮单元结构。A front opening suspending film system is designed based on （100） crystallographic orientation fast wet etching. Three different design options including folded line, long opening, long opening plus short opening in the suspending beam are arranged in the experiment. After 120 minutes＇ anisotropic etching release by 50% KOH solution at 80~C bath temperature, a complete non-adhesion suspending structure is obtained. On the base of this theory ,we obtain the （100） fast released structures for bolometer and thermopile.

关 键 词：正面腐蚀 悬浮结构 各向异性 

分 类 号：TN215[电子电信—物理电子学]