基于转镜扫描的狭缝尺寸测量系统研究  

Research on slits size measuring system based on tilting mirror scanning

作　　者：万秋一[1,2] 李士林[3,2] 闫鑫[1,2] 

机构地区：[1]中北大学信息探测与处理技术研究所 [2]中北大学信息与通信工程学院,山西太原030051 [3]中北大学动态测试技术重点实验室

出　　处：《传感器世界》2012年第2期6-9,共4页Sensor World

摘　　要：在现代工业检测中,很多地方会对狭缝尺寸进行测量。为了高速高精度的测量狭缝的尺寸,介绍了一种能在线实时测量狭缝尺寸的系统。系统通过转镜旋转扫描整个狭缝,而后对通过狭缝的光线进行反射成像并进行处理,在不移动相机的情况下扩大了相机的测量区域。系统以机器视觉技术为基础,利用线阵CCD摄像机拍摄图片,通过数字图像处理技术进行数据处理。系统克服大部分测量设备难以实现在线测量、精度低、成本高等缺点。In modern industrial detection, slit size need measure in many application fields. An online real-time system for high speed and precision slit-size measurement is introduced in this paper. The system scans the whole slit by rotating the tilting mirror, and then complete reflection imaging and signal process. So the measuring area is expanded without moving the camera. Based on machine vision technology, the system adopts linear CCD camera to shoot the photos , the digital image processing technology to process data, and overcomes the shortcomings of most other types of instruments ,such as difficult to achieve online measurement, low precision, high cost and so on.

关 键 词：狭缝 尺寸测量 转镜扫描 图像处理 

分 类 号：TH74[机械工程—光学工程]