光学读出非制冷红外成像技术的光学灵敏度分析  

Analysis of Optical Readout Sensitivity for Uncooled Infrared Imaging Based on Optical Readout

作　　者：程腾[1] 张青川[1] 高杰[1] 毛亮[1] 伍小平[1] 陈大鹏[2] 

机构地区：[1]中国科学技术大学中国科学院材料力学行为和设计重点实验室,安徽合肥230027 [2]中国科学院微电子研究所,北京100029

出　　处：《光学学报》2012年第2期44-56,共13页Acta Optica Sinica

基　　金：国家自然科学基金(11072233;10872189;10732080;11102201);中国博士后科学基金(20100480684);中央高校基本科研业务费专项资金(WK2090050017)资助课题

摘　　要：不同于传统的非制冷红外成像技术,提出了基于微电子机械系统(MEMS)的新概念光学读出非制冷红外成像技术。它的光学读出系统基于空间刀口滤波原理,具有高灵敏度、高分辨率和高抗震性等优点,但同时也受到了反光板的弯曲变形、粗糙度等复杂因素的影响。在大量实验数据的基础上,利用夫琅禾费近场衍射理论,建立了复杂因素下光学灵敏度的理论分析模型,详细分析了刀口滤波位置、反光板的长度、曲率半径、粗糙度、LED光源的强度以及扩展宽度等对光学灵敏度的影响,并提出了通过极限操作使系统的光学灵敏度最大化的光学优化方法。Much different from the conventional uncooled infrared imaging technique,a new optical readout uncooled infrared detector based on micro-electro-mechanical system（MEMS） is proposed.This optical readout system employs a knife filter,which has the advantages of high sensitivity,high resolution,and being highly aseismic.However,it is also influenced by various factors such as the radius and roughness of the reflector.According to the experimental validations and the theory of Fraunhofer diffraction,a theoretical model of the optical sensitivity is established,and the influences of various factors（such as the location of the knife filter,the length of the reflector,the radius of the reflector,the roughness of the reflector,the intensity of the LED,the width of the LED） to the optical sensitivity are analyzed.Based on these analyses,an optimization operation to maximize the optical sensitivity is also established.

关 键 词：成像系统 光学读出 非制冷红外成像 焦平面阵列 无基底 

分 类 号：O438.2[机械工程—光学工程]