真空喷雾法制备高分子功能薄膜研究进展  

Latest Progress in Functional Polymer Coatings Deposited by Vacuum Spraying

作　　者：李建昌[1] 简晓慧[1] 孙越[1] 韩宇[1] 巴德纯[1] 

机构地区：[1]东北大学机械工程与自动化学院真空流体工程研究中心,沈阳110004

出　　处：《真空科学与技术学报》2012年第2期95-103,共9页Chinese Journal of Vacuum Science and Technology

基　　金：中央高校基本科研业务费专项资金项目(N090403001);教育部留学回国人员科研启动基金项目(20091341-4)

摘　　要：高分子功能薄膜因质量轻、柔韧性好及易于加工等特点而在新型微纳光电器件上有很好的潜在应用前景。由于存在高温热致烧蚀或分解,常规的蒸发镀膜和溅射镀膜等方法无法用来制备高分子聚合物薄膜,而一般的溶液旋涂和滴涂技术,又存在薄膜易污染、孔洞多及溶剂残留等问题。近年来出现了在真空下通过溶液喷射制备聚合物薄膜的方法,该方法是将有机聚合物溶液在高压下经喷嘴直接喷射到真空室中形成细小雾滴并沉积到基片上形成薄膜。真空环境和加热可使溶剂快速蒸发,进而能够避免大量空气和溶剂在薄膜中的残留,具有操作简单且能制备多层或梯度结构复合功能薄膜的特点。本文对相关研究进行了综述,发现该方法尚存在成膜厚度不易监测,成膜影响因素缺乏系统的理论分析等问题,亟待进一步研究解决。Here,we addressed the latest development of the functional polymer films deposited by vacuum spraying technology.In vacuum spraying,a polymer solution is sprayed through a nozzle or a jet,on the substrates;the solvent in the as-deposited polymer coatings can be rapidly thermally evaporated in vacuum and removed by pumping.The discussions centered on the many advantages of the newly-developed vacuum spraying over the conventional deposition techniques,such as vacuum evaporation,sputtering in vacuum,and spin coating and dip-casting under ambient conditions,and the potential applications of the functional polymer coatings in fabrication of micro/nano optoelectronic devices.In addition,the feasibility of the growth of bi-layered and gradient structured composite coatings by vacuum spraying was also tentatively discussed.

关 键 词：聚合物薄膜 真空喷射 雾化 分子电子学 

分 类 号：O484.1[理学—固体物理] TN305[理学—物理]