THERMOELASTIC DAMPING IN A MICRO-BEAM RESONATOR TUNABLE WITH PIEZOELECTRIC LAYERS  

作　　者：Armin Saeedi Vahdat Ghader Rezazadeh Goodarz Ahmadi 

机构地区：[1]Department of Mechanical & Aeronautical Engineering,Clarkson University [2]Mechanical Engineering Department,Urmia University

出　　处：《Acta Mechanica Solida Sinica》2012年第1期73-81,共9页固体力学学报（英文版）

摘　　要：In this paper,thermoelastic damping （TED） in a micro-beam resonator with a pair of piezoelectric layers bonded on its upper and lower surfaces is investigated.Equation of motion is derived and the thermoelasticity equation is governed using two dimensional non-Fourier heat conduction model based on continuum theory frame.Applying Galerkin discretization method and complex-frequency approach to solve the equations of coupled thermoelasticity,we study TED of a clamped-clamped micro-beam resonator.The presented results demonstrate that thickness of the piezoelectric layers and application of DC voltage to them can affect the TED ratio and the critical thickness value of the resonator.In this paper,thermoelastic damping （TED） in a micro-beam resonator with a pair of piezoelectric layers bonded on its upper and lower surfaces is investigated.Equation of motion is derived and the thermoelasticity equation is governed using two dimensional non-Fourier heat conduction model based on continuum theory frame.Applying Galerkin discretization method and complex-frequency approach to solve the equations of coupled thermoelasticity,we study TED of a clamped-clamped micro-beam resonator.The presented results demonstrate that thickness of the piezoelectric layers and application of DC voltage to them can affect the TED ratio and the critical thickness value of the resonator.

关 键 词：MEMS thermoelastic damping piezoelectric RESONATOR non-Fourier heat conduc-tion 

分 类 号：TB535.1[理学—物理]